D. Krizaj, I. Iskra, Z. Topcagic, and M. Remskar
University of Ljubljana, Faculty of Electrical Engineering, Ljubljana, Slovenia
Institut Jozef Stefan, Ljubljana, Slovenia
We are developing nanoparticle detector for airborn particles. The detection principle is based on condensation of nanoparticles forming micron sized water droplets and detection of the droplets by a capacitive type nanodetector. We have successfully performed some experimental evaluations of the detection principle and are in the stage of optimization of several parts of the system. As shown ...
S. Logeshkumar, L. Lavanya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
In the model silicon nanorods are designed as cantilever array and coated with thin film of aluminum or aluminum nitride, to be characterized, thus, adding a detectable mass and altering the cantilever resistance to bending. The simulated results show that when films of different thickness are placed on the cantilever, there is a corresponding change in the resonant frequency and the ...
Optical and Electronic Materials Unit
National Institute for Materials Science
A single-crystal diamond NEMS switch was fabricated while batch production of SCD MEMS/NEMS structures were developed. The diamond NEMS switches exhibit high performance with respect to high controllability, high reproducibility, and good reliability. Modeling and simulations were made that were consistent with experiments.
Modeling of Silicon Piezoresistive Pressure Sensor: Application to Prevent Some Diabetes Complications
F. Kerrour, A. Beddiaf, M. Benabbas-Marir
MODerNa Laboratory, University Mentouri, Constantine, Algeria
Several analytical solutions describing the mechanical behavior of a silicon micro membrane deflection, perfectly embedded and subjected to a uniform and constant pressure have been proposed. The obtained results are compared with those obtained by using COMSOL software for a rectangular diaphragm deflection. COMSOL Multiphysics is powerful software for solving problems based on partial ...
Modeling Electric Fields in Slit Capillary Array Fluidic Actuators with Complex Electrode Geometries
J. Frey, A. Droitcour, D. Laser
Wave 80 Biosciences, San Francisco, CA, USA
With their small size, low manufacturing cost, fast transient response, and capacity to generate fluid power directly from small electrical power sources, microdevices incorporating electroosmostic flow (EOF) have wide-ranging applications, including newly developed high-performance bioassay systems suitable for use in resource-limited settings. We report on a class of EOF-based devices called ...
IIT Kharagpur, Kharagpur, West Bengal, India
Electroosmotic flow of power-law fluids in a slit channel(1D) is analyzed. The governing equations are the Poisson–Boltzmann equation, the Cauchy momentum equation, Generalized Smoluchowski equation and the continuity equation are used to get shear stress, dynamic viscosity, and velocity distribution. Simulations are performed to examine the effects of ?H, flow behavior index, double layer ...
A component used in RF-MEMS systems is the electrostatically actuated shunt switch. We show how this type of switch can be simulated using a simple mechanical FEMLAB model where electrostatic forces are modelled by a pressure load. The static as well as dynamic properties of the switch are analysed, e.g. static pull in and pull out voltages and displacements, dynamic switch up and down times ...
P. Cendula, S. Kiravittaya, J. Gabel, and O.G. Schmidt
Institute for Integrative Nanosciences, Dresden, Germany
Strained wrinkled and flat nanomembranes have different bending properties when they are released from the underlying substrate. This is caused by increased bending rigidity of the wrinkled film in one direction. We provide theoretical and numerical analysis of the directional rolling of wrinkled films, which is important for positioning rolled-up tubes on the short mesa edge during fabrication.
Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements
S. Cerimovic, R. Beigelbeck, H. Antlinger, J. Schalko, B. Jakoby, and F. Keplinger
Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria
A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is based on Lorentz-force excitation and features an integrated piezoresistive readout. The core sensing element is a rectangular vibrating plate suspended by four beam springs. The liquid surrounding the plate influences the resonant behavior of the system. Thus, evaluating the properties of ...
A. Regtmeier, A. Weddemann, I. Ennen, and A. Hütten
Dept. of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
Dept. of Elect. Eng. and Comp. Science, Lab. for Electromagnetic and Electronic Syst., MIT, Cambridge, MA
Institute of Solid State Physics, Vienna University of Technology, Vienna, Austria
Superparamagnetic nanoparticles have a wide range of applications in modern electric devices. Recent developments have identified them as components for a new type of magnetoresistance sensor. We propose a model for the numeric evaluation of the sensor properties. Based on the solutions of the Landau-Lifshitz-Gilbert equation for a set of homogeneously magnetized spheres arranged in highly ...