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Sensitivity Analysis of Different Models of Piezoresistive Micro Pressure Sensors

S. Meenatchisundaram[1], S. M. Kulkarni[2], S. Bhat
[1]Department of Instrumentation and Control Engineering, Manipal Institute of Technology, Manipal, Karnataka, India.
[2]Department of Mechanical Engineering, National Institute of Technology, Surathkal, Karnataka, India.

Piezoresistive pressure sensors have received much attention over the years because of low cost, simple measurement techniques, etc. There is a challenge in design with respect to appropriate positioning, shape and temperature compensation. Different models of piezoresistive pressure sensors are proposed to enhance its sensitivity in terms of output voltage. This paper aims in sensitivity ...

Study of Effect on Resonance Frequency of Piezoelectric Unimorph Cantilever for Energy Harvesting

G. R. Prakash[1], K. M. V. Swamy[1], S. Huddar[1], B. G. Sheeparamatti[1], Kirankumar B. B.[1]
[1]Basaveshwar Engineering College, Bagalkot, Karnataka, India

The focus of this paper is to study the effect on resonance frequency and power enhancement techniques[1] of piezoelectric MEMS and modeling, design, and optimization of a piezoelectric generator based on a two-layer bending element(Figure 1) using COMSOL Multiphysics. An analytical relation was developed based on the shift in resonance frequency(Figure 2) caused by the addition of a thin film ...

Design of a MEMS Capacitive Comb-drive Accelerometer

T. Kaya[1], B. Shiari[2], K. Petsch[1], and D. Yates[2]
[1]Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
[2]University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI

In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring applications. The accelerometer may have different sensitivity in different axes. The proof-mass of the device is suspended by four serpentine springs, and the comb drive structure is used to form the differential capacitor to measure the displacement of the proof-mass. The structure has an ...

Air Damping of Oscillating MEMS Structures: Modeling and Comparison with Experiment

S. Gorelick[1], M. Leivo[1], U. Kantojärvi[1]
[1]VTT Technical Research Centre of Finland, Espoo, Finland

Excessive air damping can be detrimental to the performance of oscillating MEMS components. Complex systems, such as structures in pre-etched cavities or angular comb-drive scanning mirrors, typically require simulations to reliably evaluate the air damping. The simulated and experimental performance of the following systems was evaluated and compared: two types of out-of-plane cantilevers, ...

Simulation of Piezoelectric Transformers with COMSOL

T. Andersen[1], M. A. E. Andersen[1], O. C. Thomsen[1]
[1]DTU Elektro, Technical University of Denmark, Kgs. Lyngby, Denmark

In this work COMSOL is utilized to obtain the Mason lumped parameter model for a piezoelectric transformer (PT) design. The Mason lumped parameters are relevant in the design process of power converters. The magnitude of the impedance is simulated for a specific interleaved multilayer thickness mode PT. The PT design has been prototyped and the measurements results are compared with simulations. ...

Modeling of MEMS Based Bolometer for Measuring Radiations from Nuclear Power Plant

S. Nisitha[1], T. Satyanarayana[2], S. Sreeja[1]
[1]Department of EIE, Lakireddy Bali Reddy Engineering College, Mylavaram, Andhra Pradesh, India.
[2]NPMASS Centre, Department of EIE, Lakireddy Bali Reddy Autonomous Engineering College, Mylavaram, Andhra
Pradesh, India

There has been growing demand for high performance micro sensors capable of detecting nuclear radiations being released from various industries, Nuclear reactors. Radiations emitted from the radioactive materials are invisible and not directly detectable by human senses. Thus it is highly essential to work on design of bolometers with absorptive elements providing optimum sensitivity. The ...

Effect of Geometry of the Grooves on the Mixing of Fluids in Micro Mixer Channel

V. Ranjan[1], A. Kumar[1], G. Prakash[1], R. Mandal[1]
[1]Department of Mechanical Engineering, Indian School of Mines, Dhanbad, Jharkhand, India

Understanding the flow fields at the micro-scale is a key to develop methods of successfully mixing fluids for micro-scale applications. This paper investigates flow characteristics and mixing of three different geometries in micro-channel. A Circular groove micro mixer has been designed and simulated. One such channel is shown in Figure1. The geometry of the channels taken was rectangular with a ...

Design and Analysis of MEMS Gyroscope

L. Sujatha[1], B. Preethi[1]
[1]Rajalakshmi Engineering College, Chennai, India

MEMS gyroscope technology provides cost- effective method for improving directional estimation and overall accuracy in the navigation systems. This paper presents a tuning- fork gyroscope (TFG) [1] with a perforated proof mass. The perforated proof mass used in the design enables the reduction of the damping effect. This MEMS based gyroscope was designed using COMSOL Multiphysics 4.2a. This ...

Tunable MEMS Capacitor for RF Applications

H. S. Shriram[1], T. Nimje[1], D. Vakharia[1]
[1]BITS Pilani, Rajasthan, India

Radio Frequency MEMS devices have emerged to overcome the problem of high losses associated with semiconductors at high frequencies. A tunable MEMS capacitor is a micrometre-scale electronic device whose capacitance is controlled through different actuation mechanisms which govern the moving parts. It can have electrostatic or electrothermal actuators depending on the functional complexity and ...

Fluid-structure Interaction Modeling of Air Bearing

H.R. Javani[1], P. Kagan[2], F. Huizinga[1]
[1]ASML - MDev – Mechanical analysis, Veldhoven, The Netherlands
[2]ASML - MDev – System Dynamics, Veldhoven, The Netherlands

Air bearings are special type of bearings which provide nearly zero friction between two surfaces. This is achieved by a compressed layer of gas between the surfaces. This study presents a modeling technique for an Air bearing component. COMSOL Multiphysics® is used to efficiently solve a coupled Fluid-Structure Interaction analysis. Computational time is significantly reduced compared to ...

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