Simulation of Unidirectional Interdigital Transducers in SAW Devices using COMSOL Multiphysics

D. Pradeep, N. Krishnan, and H. Nemade
Department of Electronics and Communication Engineering, Indian Institute of Technology Guwahati, India
发布日期 2008

Surface acoustic wave (SAW) devices based on Rayleigh wave, shear wave, love wave, acoustic plate mode (APM) wave and flexural plate wave have been explored for sensors, actuators and telecommunication applications. An interdigital transducer (IDT) is a metallic comb-like structure fabricated over piezoelectric substrate. SAWs are generated over the substrate by applying electrical signal to the IDT. A unidirectional IDT is a type of IDT where the propagation of SAW is restricted to one direction. In this paper we have modeled a floating electrode unidirectional IDT using COMSOL Multiphysics. In this simulation YZ lithium niobate is chosen as the substrate with mass less electrodes. Furtheron, the simulation results can be extended to extract coupling of mode parameters, which are crucial in designing SAW devices.

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