论文和技术资料

Template assisted electrodeposition (also known by its german abriviation: LIGA) is a well-known tech-nique to create metallic nano-, and microcomponents. Recent progress in 3D lithography techniques provides tools to create complex 3D templates for electrodeposition in the micro- and nanoscale. A 3D tertiary current distribution simulation was created, to investigate the various challenges that arise dur-ing the LIGA process, such deposit growth velocity, local current density in the template, mass transfer trough the template to the electrode front. The simulation was based on multiple electrochemical measurements to assess electrolyte properties. A 3D microstructure design was chosen for future me-chanical testing and the simulation was used to assist with the template design and determination of the correct reverse pulse deposition parameters to reach a good filling ratio. The nickel 3D structure was successfully deposited and the microstructure within was investigated.