Design and Finite Element Analysis of Electrothermal Compliant Microactuators

A. R. Kalaiarasi, and S. H. Thilagar
Annauniversity Chennai
TamilNadu, India
发布日期 2011

Electrothermal actuators are capable of providing larger displacements compared to electrostatic actuators. Four designs for ETC actuators with the same material properties and same dimensions are studied.