Rm 2[mm] Membrane radius Hm 18[µm] Air gap thickness tm 7[µm] Membrane thickness G 3*Hm Slit gap width Tm0 3150[N/m] Membrane static tension rhom 8300[kg/m^3] Membrane density rhoms rhom*tm Areal membrane denisty pin 1[Pa] External incident pressure muB0 10e-6[Pa*s] Bulk viscosity p0 0[Pa] Pressure-release pressure Em 221[GPa] Membrane elastic modulss Qm 6e-10[C] Static polarization charge Vpol 100[V] Polarization voltage num 0.4 Poissons ratio